Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6303397 | Method for benchmarking thin film measurement tools | Yuanning Chen, Yi Ma, Roger M. Young | 2001-10-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6303397 | Method for benchmarking thin film measurement tools | Yuanning Chen, Yi Ma, Roger M. Young | 2001-10-16 |