| 7694871 |
Self-encapsulated silver alloys for interconnects |
— |
2010-04-13 |
| 7527188 |
Self-encapsulated silver alloys for interconnects |
— |
2009-05-05 |
| 7189292 |
Self-encapsulated silver alloys for interconnects |
— |
2007-03-13 |
| 6964923 |
Selective polishing with slurries containing polyelectrolytes |
— |
2005-11-15 |
| 6840009 |
Sliding window structure with sash guiding tracks |
Gabor Michels |
2005-01-11 |
| 6824579 |
Selective polishing with slurries containing polyelectrolytes |
— |
2004-11-30 |
| 6641632 |
Polishing compositions and use thereof |
— |
2003-11-04 |
| 6413866 |
Method of forming a solute-enriched layer in a substrate surface and article formed thereby |
Horatio S. Wildman, Lawrence A. Clevenger, Chenting Lin, Kenneth P. Rodbell, Stefan Weber +2 more |
2002-07-02 |
| 6238469 |
Dual-valent rare earth additives to polishing slurries |
— |
2001-05-29 |
| 6227658 |
Apparatus and method for forming thin film using ink-jet mechanism |
Tetsuo Matsuda |
2001-05-08 |
| 6110396 |
Dual-valent rare earth additives to polishing slurries |
— |
2000-08-29 |
| 5994241 |
Method of forming conductive lines on a semiconductor wafer |
— |
1999-11-30 |
| 5972787 |
CMP process using indicator areas to determine endpoint |
Karl E. Boggs, Chenting Lin, Joachim Nuetzel, Robert Ploessl, Florian Schnabel +1 more |
1999-10-26 |
| 5968280 |
Method for cleaning a surface |
— |
1999-10-19 |
| 5876490 |
Polish process and slurry for planarization |
— |
1999-03-02 |
| 5752875 |
Method of chemically-mechanically polishing an electronic component |
— |
1998-05-19 |
| 4526629 |
Catalytic oxidation of solid materials |
Ernst-Eberhard Latta |
1985-07-02 |
