Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6291833 | Apparatus for mapping scratches in an oxide film | William Francis Landers | 2001-09-18 |
| 6048745 | Method for mapping scratches in an oxide film | William Francis Landers | 2000-04-11 |
| 5993059 | Combined emissivity and radiance measurement for determination of temperature of radiant object | James A. O'Neill | 1999-11-30 |
| 5953115 | Method and apparatus for imaging surface topography of a wafer | William Francis Landers | 1999-09-14 |
| 5770097 | Control of etch selectivity | James A. O'Neill | 1998-06-23 |
| 5738440 | Combined emissivity and radiance measurement for the determination of the temperature of a radiant object | James A. O'Neill | 1998-04-14 |
| 5683538 | Control of etch selectivity | James A. O'Neill | 1997-11-04 |
| 5534066 | Fluid delivery apparatus having an infrared feedline sensor | James A. O'Neill, Michael L. Passow, Tina J. Cotler, Jonathan D. Chapple-Sokol, Richard A. Conti | 1996-07-09 |
| 5492718 | Fluid delivery apparatus and method having an infrared feedline sensor | James A. O'Neill, Michael L. Passow, Tina J. Cotler, Jonathan D. Chapple-Sokol, Richard A. Conti | 1996-02-20 |
| 5387777 | Methods and apparatus for contamination control in plasma processing | Reid S. Bennett, Albert R. Ellingboe, George G. Gifford, Kurt L. Haller, John S. McKillop +1 more | 1995-02-07 |
| 5382911 | Reaction chamber interelectrode gap monitoring by capacitance measurement | Tina J. Cotler, John C. Forster, Lawrence Andrew Kropp | 1995-01-17 |
| 5367139 | Methods and apparatus for contamination control in plasma processing | Reid S. Bennett, Albert R. Ellingboe, George G. Gifford, Kurt L. Haller, John S. McKillop +1 more | 1994-11-22 |
| 5308414 | Method and apparatus for optical emission end point detection in plasma etching processes | James A. O'Neill, Michael L. Passow | 1994-05-03 |
| 4846920 | Plasma amplified photoelectron process endpoint detection apparatus | John H. Keller, Gary S. Selwyn | 1989-07-11 |