Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6258497 | Precise endpoint detection for etching processes | David Stanasolovich, Marc Jay Weiss, Dennis S. Yee | 2001-07-10 |
| 5382911 | Reaction chamber interelectrode gap monitoring by capacitance measurement | Tina J. Cotler, John C. Forster, Jyothi Singh | 1995-01-17 |