Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6258497 | Precise endpoint detection for etching processes | Lawrence Andrew Kropp, David Stanasolovich, Dennis S. Yee | 2001-07-10 |
| 5670018 | Isotropic silicon etch process that is highly selective to tungsten | Elke Eckstein, Birgit Hoffman, deceased, Edward W. Kiewra, Waldemar Walter Kocon | 1997-09-23 |