Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10416566 | Optimization of source and bandwidth for new and existing patterning devices | Willard E. Conley, Wei-An Hsieh, Cheng-Hsien Hsieh | 2019-09-17 |
| 9563135 | Process tuning with polarization | Steven George Hansen, Heine Melle Mulder | 2017-02-07 |
| 8945800 | Method of preparing a pattern, method of forming a mask set, device manufacturing method and computer program | Mircea Dusa, Alek Chi-Heng Chen | 2015-02-03 |