Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9541500 | Method for calibrating a manufacturing process model | Kuen-Yu Tsai, Jia Li | 2017-01-10 |
| 8945800 | Method of preparing a pattern, method of forming a mask set, device manufacturing method and computer program | Tsann-Bim Chiou, Mircea Dusa | 2015-02-03 |
| 7713682 | Substrate, method of exposing a substrate, machine readable medium | — | 2010-05-11 |
| 7582413 | Substrate, method of exposing a substrate, machine readable medium | — | 2009-09-01 |
| 6717685 | In situ proximity gap monitor for lithography | — | 2004-04-06 |
| 5504793 | Magnification correction for 1-X proximity X-Ray lithography | — | 1996-04-02 |