| 6207787 |
Antireflective coating for microlithography |
James T. Fahey, Brian Herbst, Leo L. Linehan, Wayne M. Moreau, Gary T. Spinillo +1 more |
2001-03-27 |
| 6018862 |
Thin-film magnetic recording head using a plated metal gap layer |
Frank Edgar Stageberg, Kenneth P. Ash, Feng Wang, Sara L. Gordon, Wojciech Worwag +1 more |
2000-02-01 |
| 5795701 |
Making of microlithographic structures with an underlayer film containing a thermolyzed azide compound |
Willard E. Conley, James T. Fahey, Wayne M. Moreau, Ratnam Sooriyakumaran |
1998-08-18 |
| 5783361 |
Microlithographic structure with an underlayer film containing a thermolyzed azide compound |
Willard E. Conley, James T. Fahey, Wayne M. Moreau, Ratnam Sooriyakumaran |
1998-07-21 |
| 5736301 |
Method for patterning a photoresist material wherein an anti-reflective coating comprising a copolymer of bisphenol A and benzophenone is used |
James T. Fahey, Brian Herbst, Leo L. Linehan, Wayne M. Moreau, Gary T. Spinillo +1 more |
1998-04-07 |
| 5663036 |
Microlithographic structure with an underlayer film comprising a thermolyzed azide |
Willard E. Conley, James T. Fahey, Wayne M. Moreau, Ratnam Sooriyakumaran |
1997-09-02 |
| 5607824 |
Antireflective coating for microlithography |
James T. Fahey, Brian Herbst, Leo L. Linehan, Wayne M. Moreau, Gary T. Spinillo +1 more |
1997-03-04 |
| 5554485 |
Mid and deep-UV antireflection coatings and methods for use thereof |
Robert R. Dichiara, James T. Fahey, Pamela E. Jones, Christopher F. Lyons, Wayne M. Moreau +3 more |
1996-09-10 |
| 5482817 |
Mid and deep-uv antireflection coatings and methods for use thereof |
Robert R. Dichiara, Christopher F. Lyons, Ratnasabapathy Sooriyakumaran, Gary T. Spinillo, Robert L. Wood |
1996-01-09 |
| 5401614 |
Mid and deep-UV antireflection coatings and methods for use thereof |
Robert R. Dichiara, James T. Fahey, Pamela E. Jones, Christopher F. Lyons, Wayne M. Moreau +3 more |
1995-03-28 |
| 5380621 |
Mid and deep-UV antireflection coatings and methods for use thereof |
Robert R. Dichiara, Christopher F. Lyons, Ratnasabapathy Sooriyakumaran, Gary T. Spinillo, Robert L. Wood |
1995-01-10 |
| 5372912 |
Radiation-sensitive resist composition and process for its use |
Robert David Allen, Jr. Conley, William D. Hinsberg, Pamela E. Jones |
1994-12-13 |
| 5164278 |
Speed enhancers for acid sensitized resists |
William R. Brunsvold, Christopher J. Knors, Melvin Montgomery, Wayne M. Moreau |
1992-11-17 |
