Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5554485 | Mid and deep-UV antireflection coatings and methods for use thereof | Robert R. Dichiara, James T. Fahey, Christopher F. Lyons, Wayne M. Moreau, Ratnam Sooriyakumaran +3 more | 1996-09-10 |
| 5401614 | Mid and deep-UV antireflection coatings and methods for use thereof | Robert R. Dichiara, James T. Fahey, Christopher F. Lyons, Wayne M. Moreau, Ratnam Sooriyakumaran +3 more | 1995-03-28 |
| 5372912 | Radiation-sensitive resist composition and process for its use | Robert David Allen, Jr. Conley, William D. Hinsberg, Kevin M. Welsh | 1994-12-13 |