Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831363 | Structure and method for reducing thermo-mechanical stress in stacked vias | Timothy J. Dalton, Sanjit Das, Brett H. Engel, Habib Hichri, Bernd Kastenmeier +8 more | 2004-12-14 |
| 6657305 | Semiconductor recessed mask interconnect technology | Stephen A. Cohen, Timothy J. Dalton, John A. Fitzsimmons, Stephen M. Gates, Sampath Purushothaman +1 more | 2003-12-02 |
| 6489857 | Multiposition micro electromechanical switch | Kevin S. Petrarca, Robert A. Groves, Christopher V. Jahnes, Richard P. Volant | 2002-12-03 |
| 6207787 | Antireflective coating for microlithography | James T. Fahey, Leo L. Linehan, Wayne M. Moreau, Gary T. Spinillo, Kevin M. Welsh +1 more | 2001-03-27 |
| 5736301 | Method for patterning a photoresist material wherein an anti-reflective coating comprising a copolymer of bisphenol A and benzophenone is used | James T. Fahey, Leo L. Linehan, Wayne M. Moreau, Gary T. Spinillo, Kevin M. Welsh +1 more | 1998-04-07 |
| 5607824 | Antireflective coating for microlithography | James T. Fahey, Leo L. Linehan, Wayne M. Moreau, Gary T. Spinillo, Kevin M. Welsh +1 more | 1997-03-04 |