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Methods of forming semiconductor devices having conductors with different dimensions |
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CMOS devices with different metals in gate electrodes using spin on low-k material as hard mask |
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Method for treating a wafer edge |
Andreas Knorr |
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Sidewall sealing of porous dielectric materials |
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Method to decrease fluorine contamination in low dielectric constant films |
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Highly selective chemical dry etching of silicon nitride over silicon and silicon dioxide |
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