Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7009280 | Low-k interlevel dielectric layer (ILD) | Matthew S. Angyal, Edward Barth, Charles R. Davis, Habib Hichri, William Francis Landers +1 more | 2006-03-07 |
| 6831363 | Structure and method for reducing thermo-mechanical stress in stacked vias | Timothy J. Dalton, Brett H. Engel, Brian Herbst, Habib Hichri, Bernd Kastenmeier +8 more | 2004-12-14 |
| 6822472 | Detection of hard mask remaining on a surface of an insulating layer | Anthony K. Stamper, Eric J. White | 2004-11-23 |
| 6071816 | Method of chemical mechanical planarization using a water rinse to prevent particle contamination | David Watts, Rajeev Bajaj | 2000-06-06 |
| 6001730 | Chemical mechanical polishing (CMP) slurry for polishing copper interconnects which use tantalum-based barrier layers | János Farkas, Rajeev Bajaj, Melissa Freeman, David Watts | 1999-12-14 |
| 5928962 | Process for forming a semiconductor device | János Farkas, George R. Meyer | 1999-07-27 |
| 5897375 | Chemical mechanical polishing (CMP) slurry for copper and method of use in integrated circuit manufacture | David Watts, Rajeev Bajaj, János Farkas, Chelsea Dang, Melissa Freeman +3 more | 1999-04-27 |
| 5882243 | Method for polishing a semiconductor wafer using dynamic control | Subramoney Iyer, Olubunmi O. Adetutu, Rajeev Bajaj | 1999-03-16 |