Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6757316 | Four KHz gas discharge laser | Peter Clarke Newman, William N. Partlo, Richard L. Sandstrom, Paul C. Melcher, David M. Johns +14 more | 2004-06-29 |
| RE38054 | Reliable, modular, production quality narrow-band high rep rate F2 laser | Thomas Hofmann, Jean-Marc Hueber, Palash P. Das, Toshihiko Ishihara, John T. Melchior +7 more | 2003-04-01 |
| 6370174 | Injection seeded F2 lithography laser | Eckehard D. Onkels, Palash P. Das, Richard L. Sandstrom, Alexander I. Ershov, William N. Partlo | 2002-04-09 |
| 6330260 | F2 laser with visible red and IR control | Eckehard D. Onkels, Richard L. Sandstrom | 2001-12-11 |
| 6330261 | Reliable, modular, production quality narrow-band high rep rate ArF excimer laser | Toshihiko Ishihara, John T. Melchior, Herve A. Besaucele, Richard G. Morton, Richard M. Ness +4 more | 2001-12-11 |
| 6240117 | Fluorine control system with fluorine monitor | Mengxiong Gong, Tom A. Watson, Palash P. Das, Richard L. Sandstrom | 2001-05-29 |
| 6128323 | Reliable modular production quality narrow-band high REP rate excimer laser | David W. Myers, Herve A. Besaucele, Palash P. Das, Alexander I. Ershov, Igor V. Fomenkov +14 more | 2000-10-03 |
| 6034978 | Gas discharge laser with gas temperature control | Richard C. Ujazdowski, Robert A. Shannon, Dmitry Berger, William N. Partlo, Tom A. Watson +9 more | 2000-03-07 |
| 6018537 | Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser | Thomas Hofmann, Jean-Marc Hueber, Palash P. Das, Toshihiko Ishihara, John T. Melchior +7 more | 2000-01-25 |