Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374853 | Control system for a plurality of deep ultraviolet optical oscillators | Yingbo Zhao, Walter Dale Gillespie, Joshua Jon Thornes, Eric Anders Mason | 2025-07-29 |
| 12169363 | Radiation source testing | Russell Allen Burdt | 2024-12-17 |
| 11777271 | Method of and apparatus for extending electrode life in a laser chamber | Paul C. Melcher, Walter Dale Gillespie | 2023-10-03 |
| 11768438 | Spectral feature selection and pulse timing control of a pulsed light beam | Kevin M. O'Brien, Joshua Jon Thornes | 2023-09-26 |
| 11686951 | Reducing speckle in an excimer light source | Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Herman Philip Godfried, Frank Everts, Joshua Jon Thornes, Brian Edward King | 2023-06-27 |
| 11526083 | Spectral feature selection and pulse timing control of a pulsed light beam | Kevin M. O'Brien, Joshua Jon Thornes | 2022-12-13 |
| 11054665 | Reducing speckle in an excimer light source | Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Herman Philip Godfried, Frank Everts, Joshua Jon Thornes, Brian Edward King | 2021-07-06 |
| 10852227 | Apparatus for and method of sensing fluorine concentration | — | 2020-12-01 |
| 10845711 | Lithography optics adjustment and monitoring | Thomas F. A. Bibby, Omar Zurita, Abhishek Subramanian | 2020-11-24 |
| 10451890 | Reducing speckle in an excimer light source | Wilhelmus Patrick Elisabeth Maria OP 'T ROOT, Herman Philip Godfried, Frank Everts, Joshua Jon Thornes, Brian Edward King | 2019-10-22 |
| 10345714 | Lithography optics adjustment and monitoring | Thomas F. A. Bibby, Omar Zurita, Abhishek Subramanian | 2019-07-09 |
| 10288484 | Homogenization of light beam for spectral feature metrology | Zhongquan Zhao, Brian Edward King | 2019-05-14 |
| 10267687 | Adjusting an amount of coherence of a light beam | Thomas F. A. Bibby, Joshua Jon Thornes, Rostislav Rokitski | 2019-04-23 |
| 10228322 | Apparatus for and method of sensing fluorine concentration | — | 2019-03-12 |
| 10096967 | Wavelength control system for pulse-by-pulse wavelength target tracking in DUV light source | Rahul Ahlawat | 2018-10-09 |
| 10074953 | Erosion resistant electrodes for use in generating gas discharge laser | Siqi Luo, Richard C. Ujazdowski, Walter Dale Gillespie | 2018-09-11 |
| 10012544 | Homogenization of light beam for spectral feature metrology | Zhongquan Zhao, Brian Edward King | 2018-07-03 |
| 9945730 | Adjusting an amount of coherence of a light beam | Thomas F. A. Bibby, Joshua Jon Thornes, Rostislav Rokitski | 2018-04-17 |
| 9599510 | Estimation of spectral feature of pulsed light beam | Herman Philip Godfried | 2017-03-21 |
| 9246298 | Corrosion resistant electrodes for laser chambers | Janine Kardokus, William N. Partlo | 2016-01-26 |
| 8982922 | Very high power laser chamber optical improvements | Hong Ye, Alex Ershov, Rajasekhar Rao, Daniel J. W. Brown, Slava Rokitski +5 more | 2015-03-17 |
| 8284815 | Very high power laser chamber optical improvements | Hong Ye, Alex Ershov, Rajasekhar Rao, Daniel J. W. Brown, Slava Rokitski +5 more | 2012-10-09 |
| 7995637 | Gas discharge laser chamber | Richard L. Sandstrom, William N. Partlo, Daniel J. W. Brown, Bryan Moosman, Tae Hoon Chung +2 more | 2011-08-09 |
| 7535948 | Cathodes for fluorine gas discharge lasers | Thomas D. Steiger, Joshua Brown, Walter Dale Gillespie, Richard G. Morton | 2009-05-19 |
| 7301980 | Halogen gas discharge laser electrodes | Thomas D. Steiger, Richard C. Ujazdowski, Timothy Dyer, Walter Dale Gillespie, Bryan Moosman +2 more | 2007-11-27 |