| 8542344 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2013-09-24 |
| 8514369 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens |
2013-08-20 |
| 8482845 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2013-07-09 |
| 8481978 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +7 more |
2013-07-09 |
| 8472006 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Paul Graupner, Jan Haisma, Nicodemus Hattu, Christiaan Alexander Hoogendam +3 more |
2013-06-25 |
| 8472002 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2013-06-25 |
| 8446568 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Joeri Lof, Erik Roelof Loopstra +4 more |
2013-05-21 |
| 8427629 |
Lithographic apparatus and device manufacturing method |
Carlo Cornelis Maria Luijten, Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra +3 more |
2013-04-23 |
| 8416385 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Wendy Fransisca Johanna Gehoel-Van Ansem |
2013-04-09 |
| 8400615 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens |
2013-03-19 |
| 8354209 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens, Christiaan Alexander Hoogendam |
2013-01-15 |
| 8330936 |
Lithographic apparatus and device manufacturing method |
Youri Johannes Laurentius Maria Van Dommelen, Richard Moerman, Cédric Désiré Grouwstra |
2012-12-11 |
| 8319939 |
Immersion lithographic apparatus and device manufacturing method detecting residual liquid |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens |
2012-11-27 |
| 8248577 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Hans Jansen, Martinus Hendrikus Antonius Leenders +4 more |
2012-08-21 |
| 8208120 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +8 more |
2012-06-26 |
| 8174674 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens, Johannes Jacobus Matheus Baselmans, Paul Graupner, Erik Roelof Loopstra |
2012-05-08 |
| 8154708 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more |
2012-04-10 |
| 8142852 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam, Hans Jansen, Patricius Aloysius Jacobus Tinnemans, Leon Joseph Maria Van Den Schoor +1 more |
2012-03-27 |
| 8138486 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +7 more |
2012-03-20 |
| 8120749 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Martinus Hendrikus Antonius Leenders |
2012-02-21 |
| 8115903 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +1 more |
2012-02-14 |
| 8115899 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2012-02-14 |
| 8102502 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Bernhard Gellrich, Andreas Wurmbrand |
2012-01-24 |
| 8102507 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens, Christiaan Alexander Hoogendam |
2012-01-24 |
| 8027026 |
Lithographic apparatus and device manufacturing method |
Matthew Lipson, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Catharinus Hubertus Mulkens, Ronald A. Wilklow +1 more |
2011-09-27 |