| 7982850 |
Immersion lithographic apparatus and device manufacturing method with gas supply |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more |
2011-07-19 |
| 7961293 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Paul Graeupner, Johannes Catharinus Hubertus Mulkens +1 more |
2011-06-14 |
| 7936444 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2011-05-03 |
| 7932999 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra +4 more |
2011-04-26 |
| 7928407 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +7 more |
2011-04-19 |
| 7929112 |
Lithographic apparatus and device manufacturing method |
Roelof Frederik De Graaf, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Martinus Hendrikus Antonius Leenders +3 more |
2011-04-19 |
| 7898642 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2011-03-01 |
| 7894040 |
Lithographic apparatus and device manufacturing method |
Matthew Lipson, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Catharinus Hubertus Mulkens, Ronald A. Wilklow +1 more |
2011-02-22 |
| 7880860 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2011-02-01 |
| 7868998 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2011-01-11 |
| 7843551 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens |
2010-11-30 |
| 7834977 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +1 more |
2010-11-16 |
| 7817245 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens |
2010-10-19 |
| 7812924 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens |
2010-10-12 |
| 7808611 |
Lithographic apparatus and device manufacturing method using acidic liquid |
Marcel Mathijs Theodore Marie Dierichs, Wendy Fransisca Johanna Gehoel-Van Ansem |
2010-10-05 |
| 7808614 |
Lithographic apparatus and device manufacturing method |
Carlo Cornelis Maria Luijten, Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Martinus Hendrickus Antonius Leenders, Erik Roelof Loopstra +3 more |
2010-10-05 |
| 7804574 |
Lithographic apparatus and device manufacturing method using acidic liquid |
Marcel Mathijs Theodore Marie Dierichs, Wendy Fransisca Johanna Gehoel-Van Ansem |
2010-09-28 |
| 7779781 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Christiaan Alexander Hoogendam, Hans Jansen, Patricius Aloysius Jacobus Tinnemans, Leon Joseph Maria Van Den Schoor +1 more |
2010-08-24 |
| 7746445 |
Lithographic apparatus, device manufacturing method and a substrate |
Marcel Mathijs Theodore Marie Dierichs, Johannes Catharinus Hubertus Mulkens |
2010-06-29 |
| 7738074 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Joeri Lof, Klaus Simon, Alexander Straaijer |
2010-06-15 |
| 7733459 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Erik Roelof Loopstra +4 more |
2010-06-08 |
| 7671963 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Koen Jacobus Johannes Maria Zaal, Minne Cuperus |
2010-03-02 |
| 7670730 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens, Christiaan Alexander Hoogendam |
2010-03-02 |
| 7656502 |
Lithographic apparatus and device manufacturing method |
Harmen Klaus Van Der Schoot, Noud Jan Gilissen, Peter Paul Steijaert, Erik Roelof Loopstra, Nicolaas Rudolf Kemper +8 more |
2010-02-02 |
| 7652751 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +1 more |
2010-01-26 |