Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9348236 | Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp | Peter HELMUS, Matthew Lipson, James Kennon, Kennard White, Wilbur Jordan Reichmann, II | 2016-05-24 |
| 8902562 | Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp | Peter HELMUS | 2014-12-02 |
| 8755027 | Lithographic apparatus and device manufacturing method involving fluid mixing and control of the physical property of a fluid | Matthew Lipson, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk +1 more | 2014-06-17 |
| 8736810 | EUV reticle substrates with high thermal conductivity | Michael L. Nelson, Michael Perry | 2014-05-27 |
| 8558988 | Thin film continuous spatially modulated grey attenuators and filters | Yuli Vladimirsky, Lev Ryzhikov | 2013-10-15 |
| 8027026 | Lithographic apparatus and device manufacturing method | Matthew Lipson, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk +1 more | 2011-09-27 |
| 8013999 | Beam characterization monitor for sensing pointing or angle of an optical beam | Matthew Hansen | 2011-09-06 |
| 7894040 | Lithographic apparatus and device manufacturing method | Matthew Lipson, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk +1 more | 2011-02-22 |
| 7548370 | Layered structure for a tile wave plate assembly | Michael Albert, Justin Kreuzer | 2009-06-16 |
| 7414785 | Ultraviolet polarization beam splitter with minimum apodization | — | 2008-08-19 |
| 7335398 | Method to modify the spatial response of a pattern generator | Matthew Lipson | 2008-02-26 |
| 7081278 | Method for protection of adhesives used to secure optics from ultra-violet light | Matthew Lipson | 2006-07-25 |
| 6680794 | Polarization beam splitter for photolithography | James McClay, Matthew Gregoire | 2004-01-20 |
| 6480330 | Ultraviolet polarization beam splitter for microlithography | James McClay, Matthew Gregoire | 2002-11-12 |
| 5429732 | High rate ion beam sputtering process | Sandeep Dave | 1995-07-04 |