| 8848165 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Martinus Hendrikus Antonius Leenders |
2014-09-30 |
| 8823920 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Joeri Lof, Klaus Simon, Alexander Straaijer |
2014-09-02 |
| 8810771 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Erik Roelof Loopstra, Bernhard Gellrich, Andreas Wurmbrand |
2014-08-19 |
| 8797503 |
Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structure |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more |
2014-08-05 |
| 8755027 |
Lithographic apparatus and device manufacturing method involving fluid mixing and control of the physical property of a fluid |
Matthew Lipson, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Catharinus Hubertus Mulkens, Ronald A. Wilklow +1 more |
2014-06-17 |
| 8755033 |
Lithographic apparatus and device manufacturing method involving a barrier to collect liquid |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2014-06-17 |
| 8749754 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Koen Jacobus Johannes Maria Zaal, Minne Cuperus |
2014-06-10 |
| 8724083 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2014-05-13 |
| 8724084 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2014-05-13 |
| 8717535 |
SLM calibration |
Huibert Visser, Martinus Hendricus Hoeks, Borgert Kruizinga, Patricius Aloysius Jacobus Tinnemans, Erwin John Van Zwet +4 more |
2014-05-06 |
| 8711323 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Joeri Lof, Klaus Simon, Alexander Straaijer |
2014-04-29 |
| 8711330 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Paul Graeupner, Johannes Catharinus Hubertus Mulkens +1 more |
2014-04-29 |
| 8704998 |
Lithographic apparatus and device manufacturing method involving a barrier to collect liquid |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2014-04-22 |
| 8687168 |
Lithographic apparatus and device manufacturing method |
Roelof Frederik De Graaf, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Martinus Hendrikus Antonius Leenders +3 more |
2014-04-01 |
| 8638419 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2014-01-28 |
| 8638418 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2014-01-28 |
| 8638415 |
Active drying station and method to remove immersion liquid using gas flow supply with gas outlet between two gas inlets |
Sjoerd Nicolaas Lambertus Donders, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens |
2014-01-28 |
| 8634056 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2014-01-21 |
| 8629971 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Erik Roelof Loopstra +4 more |
2014-01-14 |
| 8587762 |
Methods relating to immersion lithography and an immersion lithographic apparatus |
Roelof Frederik De Graaf, Johannes Catharinus Hubertus Mulkens, Marcel Beckers, Paul Petrus Joannes Berkvens, David Lucien Anstotz |
2013-11-19 |
| 8570486 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens, Johannes Jacobus Matheus Baselmans, Paul Graupner, Erik Roelof Loopstra |
2013-10-29 |
| 8558989 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2013-10-15 |
| 8553201 |
Lithographic apparatus and device manufacturing method |
Henrikus Herman Marie Cox, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Koen Jacobus Johannes Maria Zaal, Minne Cuperus |
2013-10-08 |
| 8547519 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more |
2013-10-01 |
| 8542343 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2013-09-24 |