Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8780321 | Lithographic apparatus and device manufacturing method | Thijs Egidius Johannes Knaapen, Richard Joseph Bruls, Youri Johannes Laurentius Maria Van Dommelen, Johannes Henricus Wilhelmus Jacobs, Martijn Hendrik Kamphuis +10 more | 2014-07-15 |
| 8638421 | Lithographic apparatus and method of cleaning a lithographic apparatus | Edwin Cornelis Kadijk, Jeroen Van Den Akker | 2014-01-28 |
| 8587762 | Methods relating to immersion lithography and an immersion lithographic apparatus | Bob Streefkerk, Roelof Frederik De Graaf, Johannes Catharinus Hubertus Mulkens, Marcel Beckers, Paul Petrus Joannes Berkvens | 2013-11-19 |
| 8514365 | Lithographic apparatus and device manufacturing method | Frederik Eduard De Jong, Marcel Hendrikus Maria Beems, Marinus Aart Van Den Brink, Johannes Henricus Wilhelmus Jacobs, Martinus Hendrikus Antonius Leenders +10 more | 2013-08-20 |