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Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Joeri Lof, Erik Roelof Loopstra +4 more |
2007-05-29 |
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Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2007-05-08 |
| 7199858 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2007-04-03 |
| 7196770 |
Prewetting of substrate before immersion exposure |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens |
2007-03-27 |
| 7193681 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Erik Theodorus Maria Bijlaart, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens |
2007-03-20 |
| 7175968 |
Lithographic apparatus, device manufacturing method and a substrate |
Marcel Mathijs Theodore Marie Dierichs, Johannes Catharinus Hubertus Mulkens |
2007-02-13 |
| 7161654 |
Lithographic apparatus and device manufacturing method |
Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens |
2007-01-09 |
| 7161663 |
Lithographic apparatus |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam |
2007-01-09 |
| 7110081 |
Lithographic apparatus and device manufacturing method |
Christian Alexander Hoogendam, Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Jacobus Johannus Leonardus Hendricus Verspay, Antonius Theodorus Anna Maria Derksen +4 more |
2006-09-19 |
| 7075616 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Joeri Lof, Erik Roelof Loopstra +4 more |
2006-07-11 |
| 7038760 |
Lithographic apparatus and device manufacturing method |
Johannes Catharinus Hubertus Mulkens, Antonius Theodorus Anna Maria Derksen, Joeri Lof, Klaus Simon, Alexander Straaijer |
2006-05-02 |
| 7034917 |
Lithographic apparatus, device manufacturing method and device manufactured thereby |
Johannes Jacobus Matheus Baselmans, Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +1 more |
2006-04-25 |
| 6952253 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more |
2005-10-04 |