| 8749754 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Henrikus Herman Marie Cox, Jeroen Johannes Sophia Maria Mertens, Koen Jacobus Johannes Maria Zaal, Minne Cuperus |
2014-06-10 |
| 8724084 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2014-05-13 |
| 8724083 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2014-05-13 |
| 8704998 |
Lithographic apparatus and device manufacturing method involving a barrier to collect liquid |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Jeroen Johannes Sophia Maria Mertens +5 more |
2014-04-22 |
| 8687168 |
Lithographic apparatus and device manufacturing method |
Roelof Frederik De Graaf, Sjoerd Nicolaas Lambertus Donders, Hans Jansen, Martinus Hendrikus Antonius Leenders, Jeroen Johannes Sophia Maria Mertens +3 more |
2014-04-01 |
| 8638419 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens +4 more |
2014-01-28 |
| 8638418 |
Lithographic apparatus |
Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2014-01-28 |
| 8634056 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2014-01-21 |
| 8634053 |
Lithographic apparatus and device manufacturing method |
Michel Riepen, Paulus Martinus Maria Liebregts, Ronald Van Der Ham, Wilhelmus Franciscus Johannes Simons, Daniel Jozef Maria Direcks +10 more |
2014-01-21 |
| 8558989 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko +12 more |
2013-10-15 |
| 8553201 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Henrikus Herman Marie Cox, Jeroen Johannes Sophia Maria Mertens, Koen Jacobus Johannes Maria Zaal, Minne Cuperus |
2013-10-08 |
| 8547519 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders +8 more |
2013-10-01 |
| 8542343 |
Lithographic apparatus |
Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2013-09-24 |
| 8542344 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +4 more |
2013-09-24 |
| 8482845 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more |
2013-07-09 |
| 8481978 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Sebastiaan Maria Johannes Cornelissen, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Hernes Jacobs +7 more |
2013-07-09 |
| 8472006 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Paul Graupner, Jan Haisma, Nicodemus Hattu +3 more |
2013-06-25 |
| 8472002 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko +12 more |
2013-06-25 |
| 8446563 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Nicolaas Ten Kate +12 more |
2013-05-21 |
| 8446568 |
Lithographic apparatus and device manufacturing method |
Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens +4 more |
2013-05-21 |
| 8441617 |
Substrate placement in immersion lithography |
Gerrit Johannes Nijmeijer, Minne Cuperus, Petrus Anton Willem Cornelia Maria Van Eijck |
2013-05-14 |
| 8354209 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens |
2013-01-15 |
| 8319939 |
Immersion lithographic apparatus and device manufacturing method detecting residual liquid |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens |
2012-11-27 |
| 8259287 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2012-09-04 |
| 8248577 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Hans Jansen, Martinus Hendrikus Antonius Leenders +4 more |
2012-08-21 |