| 8233134 |
Lithographic apparatus and device manufacturing method |
Marcus Adrianus Van De Kerkhof, Siebe Landheer, Jeroen Peter Johannes Bruijstens, Franciscus Johannes Joseph Janssen, Ivo Adam Johannes Thomas |
2012-07-31 |
| 8004654 |
Lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Ferdy Migchelbrink |
2011-08-23 |
| 7808614 |
Lithographic apparatus and device manufacturing method |
Carlo Cornelis Maria Luijten, Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Martinus Hendrickus Antonius Leenders, Erik Roelof Loopstra +3 more |
2010-10-05 |
| 7804577 |
Lithographic apparatus |
Martinus Hendrikus Antonius Leenders, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Joost Jeroen Ottens, Johannes Petrus Maria Smeulers +2 more |
2010-09-28 |
| 7542127 |
Lithographic apparatus and method for manufacturing a device |
Timotheus Franciscus Sengers, Nicolaas Antonius Allegondus Johannes Van Asten, Wilhelmus Josephus Box, Tjarko Adriaan Rudolf Van Empel, Leon Martin Levasier +6 more |
2009-06-02 |
| 7522261 |
Lithographic apparatus and device manufacturing method |
Carlo Cornelis Maria Luijten, Sjoerd Nicolaas Lambertus Donders, Nicolaas Rudolf Kemper, Martinus Hendrickus Antonius Leenders, Erik Roelof Loopstra +3 more |
2009-04-21 |
| 7411654 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Nicolaas Rudolf Kemper +2 more |
2008-08-12 |
| 7411658 |
Lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Ferdy Migchelbrink |
2008-08-12 |
| 7271873 |
Lithographic apparatus and device manufacturing method |
Nicolas Lallemant, Martinus Cornelis Maria Verhagen, Ronald Stultiens, Pascal Antonius Smits, Wladimir Fransiscus Hertog +3 more |
2007-09-18 |
| 7148951 |
Lithographic apparatus |
Nicolas Lallemant, Stephan Koelink, Rob Jansen, Wladimir Fransiscus Hertog, David Theodorus Willy Van Der Plas |
2006-12-12 |
| 7136142 |
Lithographic apparatus having a gas flushing device |
Ronald Johannes Hultermans, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Nicolaas Franciscus Koppelaars, Jan-Marius Schotsman +2 more |
2006-11-14 |
| 7072021 |
Lithographic apparatus and device manufacturing method |
Nicolas Lallemant, Martinus Cornelis Maria Verhagen, Ronald Stultiens, Pascal Antonius Smits, Wladimir Franciscus Gerardus Maria Hertog +3 more |
2006-07-04 |
| 7057702 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Johannes Catharinus Hubertus Mulkens, Jeroen Johannes Sophia Maria Mertens, Antonius Johannes Van Der Net, Ronald Van Der Ham +1 more |
2006-06-06 |