Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664264 | Lithographic apparatus, method for unloading a substrate and method for loading a substrate | Andre Bernardus Jeunink, Robby Franciscus Josephus MARTENS, Youssef Karel Maria De Vos, Ringo Petrus Cornelis VAN DORST, Gerhard Albert TEN BRINKE +11 more | 2023-05-30 |
| 6721036 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Menno Fien, Evert Hendrik Jan Draaijer | 2004-04-13 |
| 6388823 | Optical system, especially a projection light facility for microlithography | Erwin Gaber, Christian Wagner, Hubert Holderer, Michael Gerhard, Erich Merz +1 more | 2002-05-14 |