Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7227614 | Measurement method, device manufacturing method and lithographic apparatus | Hans Butler | 2007-06-05 |
| 7193722 | Lithographic apparatus with disturbance correction system and device manufacturing method | Hans Butler, Henrikus Herman Marie Cox, Martinus Agnes Willem Cuijpers, Jan Jaap Kuit | 2007-03-20 |