Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11016402 | Particle removal apparatus and associated system | Jeroen Van Duivenbode, Petrus Jacobus Maria VAN GILS, Coen Hubertus Matheus Baltis | 2021-05-25 |
| 10613445 | Methods and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process | Marc Hauptmann, Dylan John David Davies, Paul Janssen, Naoko Tsugama, Richard Joseph Bruls +5 more | 2020-04-07 |
| 10241418 | Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus | Marc Hauptmann, Dylan John David Davies, Paul Janssen, Naoko Tsugama, Richard Joseph Bruls +5 more | 2019-03-26 |