| 10197927 |
Lithographic apparatus and device manufacturing method having a barrier and/or a contamination removal device for a sensor and/or grating |
Johannes Catharinus Hubertus Mulkens |
2019-02-05 |
| 10120292 |
Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot +6 more |
2018-11-06 |
| 10018924 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Siegfried Alexander Tromp, Jacobus Josephus Leijssen +3 more |
2018-07-10 |
| 10018925 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Joost Jeroen Ottens, Marcel Beckers, Marco Polizzi, Michel Riepen +4 more |
2018-07-10 |
| 9989867 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade |
2018-06-05 |
| 9983482 |
Radiation collector, radiation source and lithographic apparatus |
Erik Roelof Loopstra, Olav Waldemar Vladimir Frijns, Stig Bieling, Antonius Theodorus Wilhelmus Kempen, Ivo Vanderhallen +6 more |
2018-05-29 |
| 9971255 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Niek Jacobus Johannes Roset, Michel Riepen, Henricus Jozef Castelijns, Cornelius Maria Rops +1 more |
2018-05-15 |
| 9927715 |
Lithographic apparatus, cover for use in a lithographic apparatus and method for designing a cover for use in a lithographic apparatus |
Niek Jacobus Johannes Roset, Sergei Shulepov, Raymond Wilhelmus Louis Lafarre |
2018-03-27 |
| 9904185 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2018-02-27 |
| 9857695 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Rudolf Kemper +2 more |
2018-01-02 |
| 9857696 |
Substrate table, a lithographic apparatus and a device manufacturing method |
Raymond Wilhelmus Louis Lafarre |
2018-01-02 |
| 9766556 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Sergei Shulepov |
2017-09-19 |
| 9753383 |
Radiation source and lithographic apparatus |
Michel Riepen, Dzmitry Labetski, Wilbert Jan Mestrom, Wim Ronald Kampinga, Jan Okke Nieuwenkamp +12 more |
2017-09-05 |
| 9737934 |
Substrate holder and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg |
2017-08-22 |
| 9678445 |
Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade |
2017-06-13 |
| 9632435 |
Lithographic apparatus and method |
Johannes Henricus Wilhelmus Jacobs, Joost Jeroen Ottens, Bastiaan Andreas Wilhelmus Hubertus Knarren, Thibault Simon Mathieu Laurent, Robbert Jan Voogd +3 more |
2017-04-25 |
| 9625828 |
Fluid handling structure, lithographic apparatus and device manufacturing method |
Michel Riepen, Erik Henricus Egidius Catharina Eummelen, Sandra Van Der Graaf, Rogier Hendrikus Magdalena Cortie, Takeshi Kaneko +6 more |
2017-04-18 |
| 9606429 |
Lithographic apparatus, drying device, metrology apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Joost Jeroen Ottens, Marcel Beckers, Marco Polizzi, Michel Riepen +4 more |
2017-03-28 |
| 9588437 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method |
Rogier Hendrikus Magdalena Cortie, Niek Jacobus Johannes Roset, Michel Riepen, Henricus Jozef Castelijns, Cornelius Maria Rops +1 more |
2017-03-07 |
| 9507278 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2016-11-29 |
| 9507275 |
Support apparatus, lithographic apparatus and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Adrianus Hendrik Koevoets, Sjoerd Nicolaas Lambertus Donders, Menno Fien, Antonius Franciscus Johannes De Groot +6 more |
2016-11-29 |
| 9507274 |
Substrate holder and method of manufacturing a substrate holder |
Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg |
2016-11-29 |
| 9488923 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more |
2016-11-08 |
| 9454089 |
Substrate table, a lithographic apparatus and a device manufacturing method |
Raymond Wilhelmus Louis Lafarre |
2016-09-27 |
| 9448494 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Sergei Shulepov |
2016-09-20 |