| 8705009 |
Heat pipe, lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Joost Jeroen Ottens, Gerrit Van Donk, Johannes Van Es |
2014-04-22 |
| 8681311 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Michel Riepen, Sergei Shulepov, Sjoerd Nicolaas Lambertus Donders |
2014-03-25 |
| 8659742 |
Lithographic apparatus and a device manufacturing method |
Niek Jacobus Johannes Roset, Raymond Wilhelmus Louis Lafarre, Alexander Nikolov Zdravkov |
2014-02-25 |
| 8553206 |
Lithographic apparatus, coverplate and device manufacturing method |
Raymond Wilhelmus Louis Lafarre, Laurentius Johannes Adrianus Van Bokhoven, Henricus Jozef Castelijns |
2013-10-08 |
| 8405819 |
Immersion lithographic apparatus and device manufacturing method |
Laurentius Johannes Adrianus Van Bokhoven, Raymond Wilhelmus Louis Lafarre, Henricus Jozef Castelijns, Petrus Martinus Gerardus Johannes Arts |
2013-03-26 |
| 8279396 |
Lithographic apparatus and device manufacturing method |
Willem Jurrianus Venema, Ronald Van Der Ham |
2012-10-02 |
| 8274641 |
Substrate table, lithographic apparatus and device manufacturing method |
Eva Mondt, Noud Jan Gilissen, Hernes Jacobs, Erik Roelof Loopstra, Marcus Martinus Petrus Adrianus Vermeulen +1 more |
2012-09-25 |
| 8259287 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Rudolf Kemper +2 more |
2012-09-04 |
| 8203693 |
Liquid immersion lithography system comprising a tilted showerhead relative to a substrate |
Aleksandr Khmelichek, Harry Sewell, Louis John Markoya, Erik Roelof Loopstra |
2012-06-19 |
| 8149379 |
Lithographic apparatus and device manufacturing method |
Sjoerd Nicolaas Lambertus Donders, Lucas Henricus Johannes Stevens, Ronald Van Der Ham, Michel Riepen |
2012-04-03 |
| 8144305 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Michel Riepen, Sergei Shulepov |
2012-03-27 |
| 8031325 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more |
2011-10-04 |
| 8023101 |
Lithographic apparatus and device manufacturing method |
Martinus Hendrikus Antonius Leenders, Sjoerd Nicolaas Lambertus Donders, Michel Riepen, Sergei Shulepov |
2011-09-20 |
| 8004654 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Johannes Henricus Wilhelmus Jacobs, Ferdy Migchelbrink |
2011-08-23 |
| 7859644 |
Lithographic apparatus, immersion projection apparatus and device manufacturing method |
Jan-Gerard Cornelis Van Der Toorn, Hans Butler, Henrikus Herman Marie Cox, Evert Hendrik Jan Draaijer, Frits Van Der Meulen +4 more |
2010-12-28 |
| 7852457 |
Lithographic apparatus and device manufacturing method |
Stefan Philip Christiaan Belfroid, Nicolaas Rudolf Kemper, Johannes Petrus Maria Smeulers, Arno Willem Frederik Volker, Rene Breeuwer |
2010-12-14 |
| 7834974 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Sergei Shulepov |
2010-11-16 |
| 7804577 |
Lithographic apparatus |
Martinus Hendrikus Antonius Leenders, Nicolaas Rudolf Kemper, Joost Jeroen Ottens, Marcel Beckers, Johannes Petrus Maria Smeulers +2 more |
2010-09-28 |
| 7804575 |
Lithographic apparatus and device manufacturing method having liquid evaporation control |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer, Jeroen Johannes Sophia Maria Mertens +20 more |
2010-09-28 |
| 7751027 |
Lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Igor Petrus Maria Bouchoms, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra +6 more |
2010-07-06 |
| 7701550 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more |
2010-04-20 |
| 7656502 |
Lithographic apparatus and device manufacturing method |
Harmen Klaus Van Der Schoot, Noud Jan Gilissen, Peter Paul Steijaert, Erik Roelof Loopstra, Nicolaas Rudolf Kemper +8 more |
2010-02-02 |
| 7656501 |
Lithographic apparatus |
Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders, Joost Jeroen Ottens, Johannes Petrus Maria Smeulers |
2010-02-02 |
| 7652746 |
Lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Franciscus Johannes Joseph Janssen |
2010-01-26 |
| 7619718 |
Method and system for active purging of pellicle volumes |
Florence Luo, Herman Vogel, George Hilary Harrold |
2009-11-17 |