| 8203693 |
Liquid immersion lithography system comprising a tilted showerhead relative to a substrate |
Harry Sewell, Louis John Markoya, Erik Roelof Loopstra, Nicolaas Ten Kate |
2012-06-19 |
| 7751030 |
Interferometric lithographic projection apparatus |
Louis John Markoya, Diane McCafferty, Harry Sewell, Justin Kreuzer |
2010-07-06 |
| 7492442 |
Adjustable resolution interferometric lithography system |
Louis John Markoya, Harry Sewell |
2009-02-17 |
| 7474385 |
Adjustable resolution interferometric lithography system |
Louis John Markoya, Harry Sewell |
2009-01-06 |
| 7256864 |
Liquid immersion lithography system having a tilted showerhead relative to a substrate |
Nicolaas Ten Kate, Erik Roelof Loopstra, Louis John Markoya, Harry Sewell |
2007-08-14 |
| 7253879 |
Liquid immersion lithography system with tilted liquid flow |
Louis John Markoya, Harry Sewell |
2007-08-07 |