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Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christian Alexander Hoogendam +12 more |
2009-10-13 |
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Lithographic apparatus and device manufacturing method |
Stefan Philip Christiaan Belfroid, Nicolaas Rudolf Kemper, Johannes Petrus Maria Smeulers, Arno Willem Frederik Volker, Rene Breeuwer |
2008-08-19 |
| 7411654 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Rudolf Kemper +2 more |
2008-08-12 |
| 7411658 |
Lithographic apparatus and device manufacturing method |
Marcel Beckers, Johannes Henricus Wilhelmus Jacobs, Ferdy Migchelbrink |
2008-08-12 |
| 7330238 |
Lithographic apparatus, immersion projection apparatus and device manufacturing method |
Jan-Gerard Cornelis Van Der Toorn, Hans Butler, Henrikus Herman Marie Cox, Evert Hendrik Jan Draaijer, Frits Van Der Meulen +4 more |
2008-02-12 |
| 7251013 |
Lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs |
2007-07-31 |
| 7230673 |
Lithographic apparatus, reticle exchange unit and device manufacturing method |
— |
2007-06-12 |
| 7136142 |
Lithographic apparatus having a gas flushing device |
Marcel Beckers, Ronald Johannes Hultermans, Nicolaas Rudolf Kemper, Nicolaas Franciscus Koppelaars, Jan-Marius Schotsman +2 more |
2006-11-14 |
| 7133114 |
Lithographic apparatus and device manufacturing method |
Christiaan Alexander Hoogendam, Frits Van Der Meulen, Johannes Henricus Wilhelmus Jacobs |
2006-11-07 |