Issued Patents All Time
Showing 76–100 of 134 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442395 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Sjoerd Nicolaas Lambertus Donders, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Elisabeth Corinne Rodenburg | 2016-09-13 |
| 9429853 | Lithographic apparatus and device manufacturing method | Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Rudolf Kemper +2 more | 2016-08-30 |
| 9423699 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade | 2016-08-23 |
| 9354528 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Jan Bex, Raymond Wilhelmus Louis Lafarre, Johannes Wilhelmus Damen, Eugene Maria Brinkhof, Yogesh Pramod Karade | 2016-05-31 |
| 9298104 | Substrate holder, lithographic apparatus, and device manufacturing method | Siegfried Alexander Tromp, Raymond Wilhelmus Louis Lafarre | 2016-03-29 |
| 9268238 | Substrate table, a lithographic apparatus and a device manufacturing method | Raymond Wilhelmus Louis Lafarre | 2016-02-23 |
| 9268236 | Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder | Johannes Henricus Wilhelmus Jacobs, Igor Petrus Maria Bouchoms, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders, Erik Roelof Loopstra +6 more | 2016-02-23 |
| 9256139 | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder | Raymond Wilhelmus Louis Lafarre, Nina Vladimirovna Dziomkina, Yogesh Pramod Karade, Siegfried Alexander Tromp, Jacobus Josephus Leijssen +3 more | 2016-02-09 |
| 9235138 | Fluid handling structure, a lithographic apparatus and a device manufacturing method | Rogier Hendrikus Magdalena Cortie, Niek Jacobus Johannes Roset, Michel Riepen, Henricus Jozef Castelijns, Cornelius Maria Rops +1 more | 2016-01-12 |
| 9188880 | Lithographic apparatus and device manufacturing method involving a heater | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer, Jeroen Johannes Sophia Maria Mertens +20 more | 2015-11-17 |
| 9176393 | Lithographic apparatus and a method of operating the apparatus | Christian Gerardus Norbertus Hendricus Marie Cloin, Nicolaas Rudolf Kemper, Marco Koert Stavenga, Erik Henricus Egidius Catharina Eummelen, Michel Riepen +3 more | 2015-11-03 |
| 9099501 | Lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Sergei Shulepov | 2015-08-04 |
| 9097992 | Lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederick De Graaf, Christiaan Alexander Hoogendam +12 more | 2015-08-04 |
| 9013683 | Substrate table, a lithographic apparatus and a device manufacturing method | Raymond Wilhelmus Louis Lafarre | 2015-04-21 |
| 8976334 | Lithographic apparatus and device manufacturing method | Marcel Beckers, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Johannes Henricus Wilhelmus Jacobs, Nicolaas Rudolf Kemper +2 more | 2015-03-10 |
| 8958054 | Lithographic apparatus and device manufacturing method | Marcel Beckers, Johannes Henricus Wilhelmus Jacobs, Ferdy Migchelbrink | 2015-02-17 |
| 8953142 | Lithographic apparatus, drying device, metrology apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Joost Jeroen Ottens, Marcel Beckers, Marco Polizzi, Michel Riepen +4 more | 2015-02-10 |
| 8941815 | Substrate table for a lithographic apparatus, lithographic apparatus, method of using a substrate table and device manufacturing method | Raymond Wilhelmus Louis Lafarre, Jozef Petrus Henricus Benschop, Niek Jacobus Johannes Roset, Gerardus Adrianus Antonius Maria Kusters, Alexander Nikolov Zdravkov +2 more | 2015-01-27 |
| 8908143 | Substrate holder, lithographic apparatus, and device manufacturing method involving a heater and/or temperature sensor | Siegfried Alexander Tromp, Raymond Wilhelmus Louis Lafarre | 2014-12-09 |
| 8891053 | Lithographic apparatus, method of manufacturing an article for a lithographic apparatus and device manufacturing method | Nina Vladimirovna Dziomkina, Sandra Van Der Graaf, Henricus Jozef Castelijns | 2014-11-18 |
| 8848164 | Fluid supply system, a lithographic apparatus, a method of varying fluid flow rate and a device manufacturing method | Laurentius Johannes Adrianus Van Bokhoven, Pieter Jacob Kramer | 2014-09-30 |
| 8767169 | Lithographic apparatus, fluid handling structure for use in a lithographic apparatus and device manufacturing method | Niek Jacobus Johannes Roset, Sergei Shulepov, Raymond Wilhelmus Louis Lafarre | 2014-07-01 |
| 8755026 | Lithographic apparatus and a device manufacturing method | Jeroen Gerard Gosen, Albert Johannes Maria Jansen, Marco Koert Stavenga, Koen Steffens, Laurentius Johannes Adrianus Van Bokhoven +2 more | 2014-06-17 |
| 8755028 | Lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more | 2014-06-17 |
| 8730448 | Lithographic apparatus and device manufacturing method | Han-Kwang Nienhuys, Martinus Agnes Willem Cuijpers, Leon Martin Levasier, Jan Bernard Plechelmus Van Schoot, Yuri Johannes Gabriël Van De Vijver +11 more | 2014-05-20 |