Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12247883 | Wavelength tracking system, method to calibrate a wavelength tracking system, lithographic apparatus, method to determine an absolute position of a movable object, and interferometer system | Engelbertus Antonius Fransiscus Van Der Pasch, Suzanne Johanna Antonetta Geertruda Cosijns, Koen Govert Olivier VAN DE MEERAKKER | 2025-03-11 |
| 7849605 | Measuring assembly and method for determining the relative position of machine parts | Henrikus Adrianus Maria Spaan | 2010-12-14 |