| 9891542 |
Lithographic apparatus and device manufacturing method |
Jan Steven Christiaan Westerlaken, Gerardus Arnoldus Hendricus Franciscus Janssen, Peter Paul Steijaert, Franciscus Van De Mast |
2018-02-13 |
| 9785060 |
Stage system and lithographic apparatus comprising such stage system |
Ruud Antonius Catharina Maria Beerens, Rob Johan Theodoor Rutten, Jan Steven Christiaan Westerlaken, Koen Jacobus Johannes Maria Zaal, Richard Henricus Adrianus Van Lieshout |
2017-10-10 |
| 9746312 |
Lithographic apparatus and method for measuring a position |
Hans Butler |
2017-08-29 |
| 9696638 |
Lithographic apparatus |
Joost Jeroen Ottens, Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, William Peter Van Drent, Frank Staals +2 more |
2017-07-04 |
| 9606458 |
Method for calibration of an encoder scale and a lithographic apparatus |
Jeroen Dekkers, Andre Bernardus Jeunink, Erik Roelof Loopstra, Michael Jozef Mathijs Renkens, Carolus Johannes Catharina Schoormans +1 more |
2017-03-28 |
| 9575416 |
Lithographic apparatus, device manufacturing method and displacement measurement system |
Ruud Antonius Catharina Maria Beerens, Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Fransiscus Mathijs Jacobs, Willem Herman Gertruda Anna Koenen +1 more |
2017-02-21 |
| 9529277 |
Lithographic apparatus and device manufacturing method |
Jan Steven Christiaan Westerlaken, Gerardus Arnoldus Hendricus Franciscus Janssen, Peter Paul Steijaert, Franciscus Van De Mast |
2016-12-27 |
| 9470988 |
Substrate positioning system, lithographic apparatus and device manufacturing method |
Albert Johannes Maria Jansen, Andre Bernardus Jeunink, Johannes Mathias Theodorus Antonius Adriaens, Frank Auer, Peterjan Broomans +4 more |
2016-10-18 |
| 9410796 |
Lithographic apparatus and method |
Ruud Antonius Catharina Maria Beerens, Johannes Petrus Martinus Bernardus Vermeulen, Theodorus Petrus Maria Cadee, Raymond Wilhelmus Louis Lafarre |
2016-08-09 |
| 9329501 |
Lithographic apparatus, method of deforming a substrate table and device manufacturing method |
Yang-Shan Huang, Hans Butler, Jan Van Eijk, Sven Antoin Johan Hol, Bastiaan Lambertus Wilhelmus Marinus Van De Ven +3 more |
2016-05-03 |
| 9316928 |
Stage apparatus, lithographic apparatus and method of positioning an object table |
Emiel Jozef Melanie Eussen, Andre Bernardus Jeunink, Robbert Edgar Van Leeuwen |
2016-04-19 |
| 9268211 |
Lithographic apparatus, and patterning device for use in a lithographic process |
Jan Van Eijk, Johannes Petrus Martinus Bernardus Vermeulen |
2016-02-23 |
| 9229340 |
Lithographic apparatus |
Joost Jeroen Ottens, Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, William Peter Van Drent, Frank Staals +2 more |
2016-01-05 |
| 9141003 |
Lithographic apparatus and device manufacturing method |
Ruud Antonius Catharina Maria Beerens, Sjoerd Nicolaas Lambertus Donders, Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Johannes Petrus Martinus Bernardus Vermeulen |
2015-09-22 |
| 9116423 |
Imprint lithography apparatus |
Andre Bernardus Jeunink, Vadim Yevgenyevich Banine, Hans Butler, Johannes Petrus Martinus Bernardus Vermeulen, Yvonne Wendela Kruijt-Stegeman |
2015-08-25 |
| 9019470 |
Lithographic apparatus, and patterning device for use in a lithographic process |
Jan Van Eijk, Johannes Petrus Martinus Bernardus Vermeulen |
2015-04-28 |
| 8988650 |
Lithographic apparatus and device manufacturing method |
Jan Steven Christiaan Westerlaken, Peter Paul Steijaert, Franciscus Van De Mast, Gerardus Arnoldus Hendricus Franciscus Janssen |
2015-03-24 |
| 8982359 |
System for detecting motion, lithographic apparatus and device manufacturing method |
Jan Van Eijk, Erik Roelof Loopstra, Johannes Petrus Martinus Bernardus Vermeulen |
2015-03-17 |
| 8922756 |
Position measurement system, lithographic apparatus and device manufacturing method |
Willem Herman Gertruda Anna Koenen, Emiel Jozef Melanie Eussen, Robbert Edgar Van Leeuwen, Adrianus Hendrik Koevoets |
2014-12-30 |
| 8903156 |
Method of updating calibration data and a device manufacturing method |
Franciscus Van De Mast |
2014-12-02 |
| 8836913 |
Lithographic apparatus having an encoder type position sensor system |
Peter Paul Steijaert, Wilhelmus Josephus Box, Emiel Jozef Melanie Eussen, Erik Roelof Loopstra, Ruud Antonius Catharina Maria Beerens +1 more |
2014-09-16 |
| 8781775 |
Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatus |
Hans Butler, Emiel Jozef Melanie Eussen, Willem Herman Gertruda Anna Koenen, Harmen Klaas Van Der Schoot, Marc Wilhelmus Maria Van Der Wijst +2 more |
2014-07-15 |
| 8760615 |
Lithographic apparatus having encoder type position sensor system |
Peter Paul Steijaert, Wilhelmus Josephus Box, Emiel Jozef Melanie Eussen, Erik Roelof Loopstra, Ruud Antonius Catharina Maria Beerens +1 more |
2014-06-24 |
| 8730485 |
Lithographic apparatus and device manufacturing method |
Emiel Jozef Melanie Eussen, Erik Roelof Loopstra |
2014-05-20 |
| 8687166 |
Lithographic apparatus having an encoder position sensor system |
Peter Paul Steijaert, Wilhelmus Josephus Box, Emiel Jozef Melanie Eussen, Erik Roelof Loopstra, Ruud Antonius Catharina Maria Beerens +1 more |
2014-04-01 |