Issued Patents All Time
Showing 51–75 of 90 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8614783 | Encoder-type measurement system, lithographic apparatus and method to detect an error on or in a grid or grating of an encoder-type measurement system | Emiel Jozef Melanie Eussen, Robbert Edgar Van Leeuwen, Renatus Gerardus Klaver, Martijn Robert Hamers | 2013-12-24 |
| 8570492 | Lithographic apparatus | Emiel Jozef Melanie Eussen, Johannes Henricus Wilhelmus Jacobs, Joost Jeroen Ottens, Frank Staals, Lukasz Jerzy Macht +2 more | 2013-10-29 |
| 8482719 | Positioning system, lithographic apparatus and method | Jan Van Eijk, Johannes Petrus Martinus Bernardus Vermeulen | 2013-07-09 |
| 8457385 | Measurement system and lithographic apparatus for measuring a position dependent signal of a movable object | Marc Wilhelmus Maria Van Der Wijst, Koen Jacobus Johannes Maria Zaal | 2013-06-04 |
| 8451454 | Stage system, lithographic apparatus including such stage system, and correction method | Willem Herman Gertruda Anna Koenen, Emiel Jozef Melanie Eussen | 2013-05-28 |
| 8446567 | Stage system calibration method, stage system and lithographic apparatus comprising an encoder measurement system to measure position of stage system | Hans Butler | 2013-05-21 |
| 8400617 | Lithographic apparatus having a substrate support with open cell plastic foam parts | Dirk-Jan Bijvoet, Emiel Jozef Melanie Eussen, Igor Matheus Petronella Aarts | 2013-03-19 |
| 8390820 | Displacement measurement system having a prism, for displacement measurement between two or more gratings | Renatus Gerardus Klaver, Erik Roelof Loopstra | 2013-03-05 |
| 8368868 | Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless | Johannes Petrus Martinus Bernardus Vermeulen, Marcel Koenraad Marie Baggen, Hans Butler, Henrikus Herman Marie Cox, Jan Van Eijk +7 more | 2013-02-05 |
| 8334983 | Lithographic apparatus and device manufacturing method | Ruud Antonius Catharina Maria Beerens, Sjoerd Nicolaas Lambertus Donders, Johannes Petrus Martinus Bernardus Vermeulen, Fransiscus Mathijs Jacobs | 2012-12-18 |
| 8319940 | Position measurement system and lithographic apparatus | Hans Butler | 2012-11-27 |
| 8279407 | Stage system and lithographic apparatus comprising such stage system | Ramidin Izair Kamidi, Henrikus Herman Marie Cox, Emiel Jozef Melanie Eussen, Ronald Casper Kunst, Marcel François Heertjes +1 more | 2012-10-02 |
| 8264671 | Lithographic apparatus and device manufacturing method | Igor Matheus Petronella Aarts, Johan Geerke, Frederik Eduard De Jong, Marc Van De Grift | 2012-09-11 |
| 8248583 | Lithographic apparatus and calibration method | Marinus Aart Van Den Brink, Hans Butler, Emiel Jozef Melanie Eussen, Marc Wilhelmus Maria Van Der Wijst, Georgo Angelis +4 more | 2012-08-21 |
| 8174671 | Lithographic projection apparatus and method for controlling a support structure | Erik Roelof Loopstra, Emiel Jozef Melanie Eussen, Willem Herman Gertruda Anna Koenen, Marc Wilhelmus Maria Van Der Wijst | 2012-05-08 |
| 7999912 | Lithographic apparatus and sensor calibration method | Emiel Jozef Melanie Eussen, Stefan Gertrud Marie Hendriks, Erik Roelof Loopstra, Jacob Willem Vink, Ruud Antonius Catharina Maria Beerens +2 more | 2011-08-16 |
| 7903866 | Measurement system, lithographic apparatus and method for measuring a position dependent signal of a movable object | Marc Wilhelmus Maria Van Der Wijst, Koen Jacobus Johannes Maria Zaal | 2011-03-08 |
| 7804584 | Integrated circuit manufacturing methods with patterning device position determination | Petrus Rutgerus Bartray, Wilhelmus Josephus Box, Dominicus Jacobus Petrus Adrianus Franken, Bernardus Antonius Johannes Luttikhuis, Marc Wilhelmus Maria Van Der Wijst +1 more | 2010-09-28 |
| 7636165 | Displacement measurement systems lithographic apparatus and device manufacturing method | Renatus Gerardus Klaver, Erik Roelof Loopstra | 2009-12-22 |
| 7619207 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Emiel Jozef Melanie Eussen, Onno Bram Loopstra | 2009-11-17 |
| 7602489 | Lithographic apparatus and device manufacturing method | Emiel Jozef Melanie Eussen | 2009-10-13 |
| 7599043 | Position measurement system and lithographic apparatus | Wouter Onno Pril, Emiel Jozef Melanie Eussen | 2009-10-06 |
| 7557903 | Lithographic apparatus and device manufacturing method | Carolus Johannes Catharina Schoormans, Emiel Jozef Melanie Eussen, Willem Herman Gertruda Anna Koenen, Nicolas Lallemant, Johannes Mathias Theodorus Antonius Adriaens | 2009-07-07 |
| 7515281 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra | 2009-04-07 |
| 7483120 | Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method | Bernardus Antonius Johannes Luttikhuis, Henrikus Herman Marie Cox, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot | 2009-01-27 |