Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8264671 | Lithographic apparatus and device manufacturing method | Igor Matheus Petronella Aarts, Engelbertus Antonius Fransiscus Van Der Pasch, Johan Geerke, Frederik Eduard De Jong | 2012-09-11 |