Issued Patents All Time
Showing 76–90 of 90 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7474409 | Lithographic interferometer system with an absolute measurement subsystem and differential measurement subsystem and method thereof | Emiel Jozef Melanie Eussen, Marcel Hendrikus Maria Beems | 2009-01-06 |
| 7471373 | Lithographic apparatus with patterning device position determination | Petrus Rutgerus Bartray, Wilhelmus Josephus Box, Dominicus Jacobus Petrus Adrianus Franken, Bernardus Antonius Johannes Luttikhuis, Marc Wilhelmus Maria Van Der Wijst +1 more | 2008-12-30 |
| 7443511 | Integrated plane mirror and differential plane mirror interferometer system | Emiel Jozef Melanie Eussen, Marcel Hendrikus Maria Beems | 2008-10-28 |
| 7408617 | Lithographic apparatus and device manufacturing method utilizing a large area FPD chuck equipped with encoders an encoder scale calibration method | Harmen Klaas Van Der Schoot | 2008-08-05 |
| 7362446 | Position measurement unit, measurement system and lithographic apparatus comprising such position measurement unit | Erik Roelof Loopstra | 2008-04-22 |
| 7352473 | Lithographic apparatus, device manufacturing method, and computer program | Johannes Mathias Theodorus Antonius Adriaens, Marcel Hendrikus Maria Beems | 2008-04-01 |
| 7348574 | Position measurement system and lithographic apparatus | Wouter Onno Pril, Emiel Jozef Melanie Eussen | 2008-03-25 |
| 7349072 | Lithographic apparatus and device manufacturing method | Marcel Hendrikus Maria Beems | 2008-03-25 |
| 7317539 | Polarizing beam splitter device, interferometer module, lithographic apparatus, and device manufacturing method | — | 2008-01-08 |
| 7265366 | Lithographic apparatus and device manufacturing method | Marcel Hendrikus Maria Beems, Martinus Hendrikus Antonius Leenders | 2007-09-04 |
| 7253875 | Lithographic apparatus and device manufacturing method | Bernardus Antonius Johannes Luttikhuis, Ronald Van Der Ham, Niek Jacobus Johannes Roset | 2007-08-07 |
| 7230676 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra | 2007-06-12 |
| 7177059 | Device and method for manipulation and routing of a metrology beam | Marcel Hendrikus Maria Beems, Emiel Jozef Melanie Eussen, Engelbertus Johannes Jeroen Klijntunte | 2007-02-13 |
| 7126671 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Dominicus Jacobus Petrus Adrianus Franken, Nicolaas Rudolf Kemper, Martijn Johannes Verbunt, Lambertus Adrianus Van Den Wildenberg | 2006-10-24 |
| 7119886 | Lithographic apparatus, device manufacturing method, and angular encoder | Martinus Hendrikus Antonius Leenders, Hendricus Johannes Maria Meijer, Michael Jozef Mathijs Renkens, Theo Anjes Maria Ruijl | 2006-10-10 |