Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8680721 | Coil, positioning device, actuator, and lithographic apparatus | Rody Koops, Tom Van Zutphen | 2014-03-25 |
| 7869001 | Eddy current damper, and lithographic apparatus having an eddy current damper | — | 2011-01-11 |