Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7173270 | Detector system for detecting a height of a particle, and lithographic apparatus and device manufacturing method including the same. | Anastasius Jacobus Anicetus Bruinsma, Pieter Johannes Marius Van Groos, Jan Frederick Hoogkamp, Kees Moddemeijer | 2007-02-06 |