MS

Marc Smits

AB Asml Netherlands B.V.: 6 patents #712 of 3,192Top 25%
MB Mapper Lithography Ip B.V.: 4 patents #25 of 84Top 30%
📍 Delft, NL: #44 of 1,192 inventorsTop 4%
Overall (All Time): #431,208 of 4,157,543Top 15%
11
Patents All Time

Issued Patents All Time

Showing 1–11 of 11 patents

Patent #TitleCo-InventorsDate
12202019 Method and system for the removal and/or avoidance of contamination in charged particle beam systems Johan Joost Koning, Chris Franciscus Jessica Lodewijk, Hindrik Willem Mook, Ludovic Lattard 2025-01-21
11961698 Replaceable module for a charged particle apparatus Christiaan OTTEN, Peter-Paul CRANS, Laura DEL TIN, Christan TEUNISSEN, Yang-Shan Huang +5 more 2024-04-16
11738376 Method and system for the removal and/or avoidance of contamination in charged particle beam systems Johan Joost Koning, Chris Franciscus Jessica Lodewijk, Hindrik Willem Mook, Ludovic Lattard 2023-08-29
11599028 Methods and systems for clamping a substrate 2023-03-07
10987705 Method and system for the removal and/or avoidance of contamination in charged particle beam systems Johan Joost Koning, Chris Franciscus Jessica Lodewijk, Hindrik Willem Mook, Ludovic Lattard 2021-04-27
10632509 Method and system for the removal and/or avoidance of contamination in charged particle beam systems Johan Joost Koning, Chris Franciscus Jessica Lodewijk, Hindrik Willem Mook, Ludovic Lattard 2020-04-28
9981293 Method and system for the removal and/or avoidance of contamination in charged particle beam systems Johan Joost Koning, Chris Franciscus Jessica Lodewijk, Hindrik Willem Mook, Ludovic Lattard 2018-05-29
9506881 Method and apparatus for predicting a growth rate of deposited contaminants 2016-11-29
9484187 Arrangement for transporting radicals Pieter Kruit 2016-11-01
9224580 Plasma generator Chris Franciscus Jessica Lodewijk 2015-12-29
9123507 Arrangement and method for transporting radicals Pieter Kruit 2015-09-01