Issued Patents All Time
Showing 51–64 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5834773 | Method and apparatus for testing the function of microstructure elements | Matthias Brunner, Hans-Peter Feuerbaum | 1998-11-10 |
| 5808309 | Apparatus for generating an electron beam | Rainer Spehr, Michael Schmitt | 1998-09-15 |
| 5780859 | Electrostatic-magnetic lens arrangement | Hans-Peter Feuerbaum, Koshi Ueda, Toshimichi Iwai, Gerald Schonecker | 1998-07-14 |
| 5637538 | Method and apparatus for processing a specimen | Dieter Winkler, Hans-Peter Zimmermann | 1997-06-10 |
| 5422486 | Scanning electron beam device | Karl Herrmann, Steffen Beck, Hans-Peter Feuerbaum, Andreas Benez, Stefan Lanio +1 more | 1995-06-06 |
| 5231350 | Method and apparatus for potential measurement on conductive tracks of a program-controlled integrated circuit | Hans R. Tietz | 1993-07-27 |
| 5214284 | Method and arrangement for testing and repairing an integrated circuit | Yasuo Tokunaga | 1993-05-25 |
| 5061856 | Corpuscular beam device | Rainer Spehr | 1991-10-29 |
| 5041724 | Method of operating an electron beam measuring device | Hans-Peter Feuerbaum | 1991-08-20 |
| 4623836 | Sampling method for fast potential determination in electron beam mensuration | Burkhard Lischke | 1986-11-18 |
| 4587481 | Arrangement for testing micro interconnections and a method for operating the same | Burkhard Lischke, Reinhold Schmitt | 1986-05-06 |
| 4577147 | Arrangement and method for voltage measurement at a buried test subject | Michael Pomper | 1986-03-18 |
| 4246487 | Method and device for determining the focal length of a long focal length electron optical lens | Klaus Anger, Burkhard Lischke | 1981-01-20 |
| 4219719 | Method and apparatus for automatically positioning a workpiece relative to a scanning field or mask | Helmut Reschke, deceased | 1980-08-26 |