Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5128207 | Method for producing uniform polymethylmethacrylate layers | Helmut Formanek, Magdalena Hintermaier, Erwin Knapek | 1992-07-07 |
| 5049460 | Method for producing beam-shaping diaphragms for lithographic devices | Wolfgang Benecke, Uwe Schnakenberg | 1991-09-17 |
| 4994336 | Method for manufacturing a control plate for a lithographic device | Wolfgang Benecke, Uwe Schnakenberg | 1991-02-19 |
| 4985681 | Particle beam measuring method for non-contact testing of interconnect networks | Matthias Brunner, Juergen Frosien, Reinhold Schmitt | 1991-01-15 |
| 4982099 | Aperture diaphragm for a lithography apparatus | — | 1991-01-01 |
| 4954705 | Method for examining a specimen in a particle beam instrument | Matthias Brunner | 1990-09-04 |
| 4924136 | Beam generating system for electron beam measuring instruments having cathode support structure | Dieter Winkler | 1990-05-08 |
| 4899060 | Diaphragm system for generating a plurality of particle probes haivng variable cross section | — | 1990-02-06 |
| 4786149 | Arrangement for optical image processing | Eckhardt Hoenig | 1988-11-22 |
| 4724328 | Lithographic apparatus for the production of microstructures | — | 1988-02-09 |
| 4714833 | Arrangement for detecting secondary and/or backscatter electrons in an electron beam apparatus | Harald Rose, Joachim Zach | 1987-12-22 |
| 4677296 | Apparatus and method for measuring lengths in a scanning particle microscope | Juergen Frosien | 1987-06-30 |
| 4628258 | Method and apparatus for electrical testing of microwired structures with the assistance of particle probes | — | 1986-12-09 |
| 4623836 | Sampling method for fast potential determination in electron beam mensuration | Jürgen Frosien | 1986-11-18 |
| 4601971 | Tunnel cathode mask for electron lithography and method for manufacturing and operating it | — | 1986-07-22 |
| 4587481 | Arrangement for testing micro interconnections and a method for operating the same | Jürgen Frosien, Reinhold Schmitt | 1986-05-06 |
| 4573008 | Method for the contact-free testing of microcircuits or the like with a particle beam probe | — | 1986-02-25 |
| 4551625 | Spectrometer objective for particle beam measurement technique | Erich Plies | 1985-11-05 |
| 4540885 | Spectrometer objective having parallel objective fields and spectrometer fields for the potential measuring technique | Erich Plies, Reinhard Weyl | 1985-09-10 |
| 4514638 | Electron-optical system with variable-shaped beam for generating and measuring microstructures | Juergen Frosien, Klaus Anger, Erich Plies | 1985-04-30 |
| 4393308 | High current electron source | Klaus Anger, Juergen Frosien, Erich Plies, Klaus Tonar | 1983-07-12 |
| 4246487 | Method and device for determining the focal length of a long focal length electron optical lens | Klaus Anger, Jürgen Frosien | 1981-01-20 |
| 4238680 | Method and device for setting and correcting errors of an electron optical condenser of a microprojector | Klaus Anger, Juergen Frosien | 1980-12-09 |