Issued Patents All Time
Showing 26–50 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7638777 | Imaging system with multi source array | Hans-Peter Feuerbaum, Uli Hoffmann, Dieter Winkler, Pavel Adamec | 2009-12-29 |
| 7633074 | Arrangement and method for compensating emitter tip vibrations | — | 2009-12-15 |
| 7595490 | Charged particle beam emitting device and method for operating a charged particle beam emitting device | Fang Zhou, Pavel Adamec, Jimmy Vishnipolsky | 2009-09-29 |
| 7507956 | Charged particle beam energy width reduction system for charged particle beam system | Ralf Degenhardt, Stefan Lanio | 2009-03-24 |
| 7468517 | Single stage charged particle beam energy width reduction system for charged particle beam system | Ralf Degenhardt, Stefan Lanio, Gerald Schonecker | 2008-12-23 |
| 7326927 | Focusing lens and charged particle beam device for titled landing angle operation | — | 2008-02-05 |
| 7253417 | Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lens | Pavel Adamec | 2007-08-07 |
| 6720557 | Particle beam apparatus | — | 2004-04-13 |
| 6667478 | Particle beam apparatus | Stefan Lanio | 2003-12-23 |
| 6509969 | System for inspecting and/or processing a sample | Shinpei Takeshita | 2003-01-21 |
| 6509569 | Deflection arrangement for separating two particle beams | — | 2003-01-21 |
| 6489621 | Particle beam system with a device for reducing the energy width of a particle beam | — | 2002-12-03 |
| 6459283 | Method and system for testing an electrical component | Reinhold Schmitt | 2002-10-01 |
| 6429427 | Method and apparatus for surface imaging | — | 2002-08-06 |
| 6407388 | Corpuscular beam device | — | 2002-06-18 |
| 6407387 | Particle beam apparatus | Stefan Lanio | 2002-06-18 |
| 6232601 | Dynamically compensated objective lens-detection device and method | Reinhold Schmitt, Stefan Lanio, Gerald Schonecker | 2001-05-15 |
| 6182605 | Apparatus for particle beam induced modification of a specimen | — | 2001-02-06 |
| 6107633 | Electron beam lens | Stefan Lanio, Gerald Schonecker | 2000-08-22 |
| 6104034 | Objective lens | Stefan Lanio, Gerald Schonecker | 2000-08-15 |
| 6093512 | Method and apparatus for dimension measurement and inspection of structures utilizing corpuscular beam | Akira Kintaka | 2000-07-25 |
| 6051838 | Optical unit | Stefan Lanio, Reinhold Schmitt, Gerald Schonecker | 2000-04-18 |
| 5895917 | Detector objective lens | Koshi Ueda, Toshimichi Iwai, Gerald Schonecker | 1999-04-20 |
| 5895919 | Gun lens for generating a particle beam | Stefan Lanio, Gerald Schonecker | 1999-04-20 |
| 5885354 | Method and apparatus for processing a specimen | Dieter Winkler, Hans-Peter Zimmermann | 1999-03-23 |