Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969853 | Pattern width measuring apparatus, pattern width measuring method, and electron beam exposure apparatus | Mitsuyuki Asaki | 2005-11-29 |
| 6320319 | Charged particle generating apparatus | Toshimichi Iwai, Takayuki Nakamura | 2001-11-20 |
| 6093512 | Method and apparatus for dimension measurement and inspection of structures utilizing corpuscular beam | Jürgen Frosien | 2000-07-25 |