Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8097847 | Particle-optical systems and arrangements and particle-optical components for such systems and arrangements | Oliver Kienzle, Thomas Kemen, Heiko Mueller, Stephan Uhlemann, Maximilian Haider +1 more | 2012-01-17 |
| 8039813 | Charged particle-optical systems, methods and components | Antonio Casares, Thomas Kemen, Thomas Bayer, Georg Fritz, Johann Greschner +1 more | 2011-10-18 |
| 7554094 | Particle-optical systems and arrangements and particle-optical components for such systems and arrangements | Oliver Kienzle, Thomas Kemen, Heiko Mueller, Stephan Uhlemann, Maximilian Haider +1 more | 2009-06-30 |
| 7244949 | Particle-optical systems and arrangements and particle-optical components for such systems and arrangements | Oliver Kienzle | 2007-07-17 |
| 7135677 | Beam guiding arrangement, imaging method, electron microscopy system and electron lithography system | Oliver Kienzle, Stephan Uhlemann, Max Haider, Heiko Müller | 2006-11-14 |
| 7105814 | Electron microscopy system and electron microscopy method | — | 2006-09-12 |
| 7084406 | Detector arrangement and detection method | — | 2006-08-01 |
| 6967328 | Method for the electron-microscopic observation of a semiconductor arrangement and apparatus therefor | Oliver Kienzle, Ingo Muller | 2005-11-22 |
| 6946657 | Electron microscopy system | Oliver Kienzle, Heiko Müller | 2005-09-20 |
| 6914249 | Particle-optical apparatus, electron microscopy system and electron lithography system | Oliver Kienzle | 2005-07-05 |
| 6903337 | Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same | Oliver Kienzle, Dirk Stenkamp, Michael Steigerwald, Max Haider, Heiko Müller +1 more | 2005-06-07 |
| 6891168 | Particle-optical apparatus and method for operating the same | — | 2005-05-10 |
| 6878936 | Applications operating with beams of charged particles | Oliver Kienzle | 2005-04-12 |