Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7135677 | Beam guiding arrangement, imaging method, electron microscopy system and electron lithography system | Oliver Kienzle, Rainer Knippelmeyer, Stephan Uhlemann, Heiko Müller | 2006-11-14 |
| 6903337 | Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same | Oliver Kienzle, Dirk Stenkamp, Michael Steigerwald, Rainer Knippelmeyer, Heiko Müller +1 more | 2005-06-07 |