Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8384029 | Cross-section systems and methods | Rainer Knippelmeyer, Lawrence Scipioni, Christoph Riedesel, John Morgan, Ulrich Mantz | 2013-02-26 |
| 7643149 | Method of aligning an optical system | Rolf Freimann | 2010-01-05 |
| 7508488 | Projection exposure system and method of manufacturing a miniaturized device | Rolf Freimann | 2009-03-24 |