Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8723138 | Electron beam source and method of manufacturing the same | Volker Drexel, Ulrich Mantz, Bernd Irmer | 2014-05-13 |
| 8209768 | Method of manufacturing an SPM probe with a scanning tip and with an alignment aid located opposite the scanning tip | Thomas Sulzbach, Oliver Krause, Mathieu Burri, Manfred Detterbeck, Bernd Irmer | 2012-06-26 |
| 8164071 | Electron beam source and method of manufacturing the same | Volker Drexel, Ulrich Mantz, Bernd Irmer | 2012-04-24 |