Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8209768 | Method of manufacturing an SPM probe with a scanning tip and with an alignment aid located opposite the scanning tip | Thomas Sulzbach, Mathieu Burri, Manfred Detterbeck, Bernd Irmer, Christian Penzkofer | 2012-06-26 |
| 7536901 | SPM sensor | Christoph Lehrer, Silke Petersen | 2009-05-26 |