Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8209768 | Method of manufacturing an SPM probe with a scanning tip and with an alignment aid located opposite the scanning tip | Thomas Sulzbach, Oliver Krause, Manfred Detterbeck, Bernd Irmer, Christian Penzkofer | 2012-06-26 |
| 6953751 | Micro device and process for producing it | Manfred Detterbeck, Stefan Lutter, Theo Hartmann, Terunobu Akiyama | 2005-10-11 |