Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11977097 | Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope | Rainer Becker, Kinga Kornilov, Christof Baur, Hans Hermann Pieper | 2024-05-07 |
| 11733186 | Device and method for analyzing a defect of a photolithographic mask or of a wafer | Christof Baur, Klaus Edinger, Thorsten Hofmann, Michael Budach | 2023-08-22 |
| 11353478 | Methods and devices for extending a time period until changing a measuring tip of a scanning probe microscope | Rainer Becker, Kinga Kornilov, Christof Baur, Hans Hermann Pieper | 2022-06-07 |
| 10983075 | Device and method for analysing a defect of a photolithographic mask or of a wafer | Christof Baur, Klaus Edinger, Thorsten Hofmann, Michael Budach | 2021-04-20 |
| 10578644 | Probe system and method for receiving a probe of a scanning probe microscope | Christof Baur, Sylvio Ruhm, Christoph Pohl, Björn Harnath, Matthias Weber | 2020-03-03 |
| 9910065 | Apparatus and method for examining a surface of a mask | Michael Budach, Thorsten Hofmann, Klaus Edinger, Pawel Szych | 2018-03-06 |
| 9115981 | Apparatus and method for investigating an object | Christof Baur, Klaus Edinger, Thorsten Hofmann, Michael Budach | 2015-08-25 |
| 8769709 | Apparatus and method for analyzing and modifying a specimen surface | Christof Baur, Klaus Edinger, Thorsten Hofmann | 2014-07-01 |