Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11733186 | Device and method for analyzing a defect of a photolithographic mask or of a wafer | Gabriel Baralia, Christof Baur, Klaus Edinger, Michael Budach | 2023-08-22 |
| 10983075 | Device and method for analysing a defect of a photolithographic mask or of a wafer | Gabriel Baralia, Christof Baur, Klaus Edinger, Michael Budach | 2021-04-20 |
| 10732501 | Method and device for permanently repairing defects of absent material of a photolithographic mask | Jens Oster, Kinga Kornilov, Tristan Bret, Horst Schneider | 2020-08-04 |
| 10372032 | Method and device for permanently repairing defects of absent material of a photolithographic mask | Jens Oster, Kinga Kornilov, Tristan Bret, Horst Schneider | 2019-08-06 |
| 10060947 | Method and apparatus for analyzing and for removing a defect of an EUV photomask | Michael Budach, Tristan Bret, Klaus Edinger | 2018-08-28 |
| 9910065 | Apparatus and method for examining a surface of a mask | Michael Budach, Klaus Edinger, Pawel Szych, Gabriel Baralia | 2018-03-06 |
| 9721754 | Method and apparatus for processing a substrate with a focused particle beam | Tristan Bret, Petra Spies | 2017-08-01 |
| 9115981 | Apparatus and method for investigating an object | Christof Baur, Klaus Edinger, Gabriel Baralia, Michael Budach | 2015-08-25 |
| 9023666 | Method for electron beam induced etching | Nicole Auth, Petra Spies, Rainer Becker, Klaus Edinger | 2015-05-05 |
| 8769709 | Apparatus and method for analyzing and modifying a specimen surface | Christof Baur, Klaus Edinger, Gabriel Baralia | 2014-07-01 |
| 8674329 | Method and apparatus for analyzing and/or repairing of an EUV mask defect | Michael Budach, Tristan Bret, Klaus Edinger, Heiko Feldmann, Johannes Ruoff | 2014-03-18 |
| 8632687 | Method for electron beam induced etching of layers contaminated with gallium | Nicole Auth, Petra Spies, Rainer Becker, Klaus Edinger | 2014-01-21 |
| 8623230 | Methods and systems for removing a material from a sample | Nicole Auth, Petra Spies, Tristan Bret, Rainer Becker, Klaus Edinger | 2014-01-07 |
| 8318593 | Method for electron beam induced deposition of conductive material | Nicole Auth, Petra Spies, Rainer Becker, Klaus Edinger | 2012-11-27 |
| 8247782 | Apparatus and method for investigating and/or modifying a sample | Klaus Edinger, Rainer Becker, Michael Budach | 2012-08-21 |
| 7786403 | Method for high-resolution processing of thin layers using electron beams | Hans Koops, Klaus Edinger, Sergey Babin, Petra Spies | 2010-08-31 |
| 7232997 | Apparatus and method for investigating or modifying a surface with a beam of charged particles | Klaus Edinger, Josef Sellmair | 2007-06-19 |